Millisecond response, high stability, superior straightness & flatness, stiffness, digital control
Physik Instrumente (PI), a global leader in nanopositioning and precision motion control, provides a large portfolio of piezo flexure stages engineered for ultra-precise positioning in demanding industrial and research environments.
Designed for nanometer-level accuracy and high dynamic performance, PI’s piezo flexure stages combine friction-free flexure guidance with high-force and high-resolution piezoelectric actuation. Closed-loop position control is enabled by a selection of high-resolution, absolute measuring sensors, depending on the target application. The result is exceptional repeatability, fast settling times, and virtually wear-free operation – ideal for applications requiring stable, high-bandwidth motion over small travel ranges.
Engineered for Precision and Stability
Unlike conventional bearing systems, monolithic flexure guides eliminate backlash, stiction, and mechanical play. This enables:
- Sub-nanometer resolution
- High stiffness, for short response times
- Deterministic, highly repeatable motion
- Long lifetime without mechanical wear
- High load capacity relative to size
Space-Tested Reliability
PI piezo flexure stages incorporate the company’s patented PICMA® multilayer actuators that were selected for the Mars Mission by NASA, after completing 100,000,000,000 (100 billion) test cycles without failure.
Compact Design, High Performance
PI’s piezo flexure stages are optimized for compact integration into OEM systems and automated production platforms. Available in single-axis, multi-axis stacked, and parallel-kinematic configurations, the portfolio supports:
- Linear travel ranges from tens of microns to over one millimeter
- Fast steering mirror applications for image stabilization, satellite communication and laser processing
- Fast focusing for microscopy and surface metrology
- Multi-axis positioning (XY, XYZ, tip/tilt) for scanning, optics and photonics alignment
- Load capacities from 100’s of grams to 100’s of kg
- Vacuum and cleanroom applications
When paired with PI’s high-performance digital motion controllers, including advanced scanning and alignment firmware, the stages enable high-throughput test and production in automated optics and fiber-optics workflows.
Their fast response and high stability make them particularly well suited for active alignment and high-speed scanning tasks where conventional motorized stages cannot meet bandwidth requirements.
A Scalable Technology Platform
With decades of experience in piezoelectric motion control, PI provides not only the mechanical platform but a complete motion ecosystem – including controllers, software, alignment algorithms, and system integration support. This scalable approach enables customers to move efficiently from laboratory setups to automated production environments.
Industries & Applications Served
Bio-med, fiber-positioning, aerospace, astronomy, image stabilization, terrestrial- and satellite-based free space optical communication, atomic force microscopy, semiconductor, test & measurement, 3D-printing, silicon photonics alignment and packaging, wafer-level test and metrology, super-resolution and multiphoton microscopy, laser micro-machining, laser beam steering and stabilization, quantum and cryogenic positioning systems.
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