Passive & Driven Air Bearing Linear Guides

Offering nanometer-level motion precision for surface profiling, wafer inspection, photonics alignment, and precision manufacturing tasks.

PI USA Provides Engineered Precision Gantry Positioning Systems. Image Credit: PI (Physik Instrumente) LP

PI (Physik Instrumente), a global leader in precision motion and positioning solutions, offers standard and custom air bearing linear slides. Based on decades of experience from PI’s USA engineering and manufacturing teams, these air bearings are designed for applications requiring ultra-smooth, zero stick-slip linear motion and sub-micron straightness and flatness.

Frictionless Performance for Demanding Applications

Air bearing slides float on a thin film of pressurized air, eliminating mechanical contact between moving and stationary components. This design delivers virtually zero friction, zero wear, and exceptional motion uniformity, making them ideal for:

• Precision metrology and surface profiling
• Semiconductor wafer inspection and processing
• Optical and mechanical alignment, precision assembly
• Ultra-high-resolution scanning systems
• Research and laboratory instrumentation

Key Features & Benefits

• 50 to 1000 mm motion range
• 9 platform sizes: 50×50 to 300×300 mm
• Up to 760 kg load
• Sub-micrometer-level straightness and flatness
• No lubrication required, eliminating particulate generation
• Zero backlash and zero stick-slip for smooth, uniform motion
• Long-term performance with no mechanical wear
• Configurable for integration with integrated motors, linear encoders, or external drive systems

Engineered for Integration

These U.S.-manufactured passive air bearing slides can be paired with manual adjustment mechanisms or integrated into larger automated positioning systems using linear motors or other actuation technologies. Available in multiple sizes and load capacities, PI’s slides are cleanroom-compatible and can be customized for specialized environments, including vacuum applications.

Industries Served

Optical metrology, surface profiling, Semiconductor wafer inspection, optical and mechanical alignment, precision assembly, laser technology, tribology, high-resolution scanning systems, research and laboratory instrumentation.

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